秦明

秦明，男，1967年10月生，汉族，教授，博士生导师，博士学位。

1998年4月-1999年10月在香港科技大学电子与电机工程系开展博士后研究工作。

1999年10月后回校工作，目前从事CMOS MEMS传感器与微系统的研究。2004年晋升教授。2004年获选“教育部新世纪优秀人才”，2005年列入江苏省青蓝工程学术带头人培养计划。目前是中国微米纳米学会高级会员、中国仪器仪表学会传感器分会常务理事，中国电子学会敏感技术分会气湿敏传感技术委员会委员、江苏省电子学会集成电路分会和传感技术分会秘书长。

金属诱导非晶硅横向晶化技术。

MEMS传感器与微系统、MEMS材料与加工工艺、硅半导体场致发射理论与实验研究等。

完成国家级科研项目5 项，在Journal of Microelectromechanical Systems，Journal of the Electrochemical Society，Sensors and Actuators; Thin Solid Films等国内外期刊发表论文40余篇；论文被国内外同行引用40余次，获中国发明专利6项。

Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process 作者: Cai, Chunhua; Tan, Junyan; Hua, Di; 等.SCIENTIFIC REPORTS   卷: 8     文献号: 17065   出版年: NOV 20 2018

Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications 作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   卷: 27   期: 4   页: 739-747   出版年: AUG 2018

A 2D Wind Sensor Using the Delta P Thermal Feedback Control 作者: Wang, Shang; Yi, Zhenxiang; Qin, Ming; 等.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   卷: 27   期: 3   页: 377-379   出版年: JUN 2018

EIGHT-TRIGRAM-INSPIRED MEMS THERMAL WIND SENSOR WITH IMPROVED ACCURACY 作者: Ye, Yizhou; Yi, Zhenxiang; Qin, Ming; 等.会议: 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 会议地点: Belfast, NORTH IRELAND 会议日期: JAN 21-25, 2018 会议赞助商: IEEE 2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   丛书: Proceedings IEEE Micro Electro Mechanical Systems   页: 836-839   出版年: 2018

Effect of Insulation Trenches on Micromachined Silicon Thermal Wind Sensors 作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.IEEE SENSORS JOURNAL   卷: 17   期: 24   页: 8324-8331   出版年: DEC 15 2017

Modelling and characterization of a robust, low-power and wide-range thermal wind sensor 作者: Zhu, Yanqing; Qin, Ming; Ye, Yizhou; 等.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   卷: 23   期: 12   页: 5571-5585   出版年: DEC 2017

DRIE Trenches and Full-Bridges for Improving Sensitivity of 2-D Micromachined Silicon Thermal Wind Sensor 作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   卷: 26   期: 5   页: 1073-1081   出版年: OCT 2017

Experiment of the MEMS Wind Sensor Based on Temperature-Balanced Mode 作者: Yi, Zhenxiang; Qin, Ming; Huang, Qing-An IEEE SENSORS JOURNAL   卷: 17   期: 8   页: 2316-2317   出版年: APR 15 2017

DRIE TRENCHES AND FULL-BRIDGES DESIGN FOR SENSITIVITY IMPROVEMENT OF MEMS SILICON THERMAL WIND SENSOR 作者: Ye, Yizhou; Yi, Zhenxiang; Qin, Ming; 等.会议: 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 会议地点: Las Vegas, NV 会议日期: JAN 22-26, 2017 会议赞助商: IEEE 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017)   丛书: Proceedings IEEE Micro Electro Mechanical Systems   页: 985-988   出版年: 2017

Sensitivity Improvement of a 2D MEMS Thermal Wind Sensor for Low-Power Applications 作者: Zhu, Yanqing; Qin, Ming; Huang, Jianqiu; 等.IEEE SENSORS JOURNAL   卷: 16   期: 11   特刊: SI   页: 4300-4308   出版年: JUN 1 2016

Temperature Effects on the Wind Direction Measurement of 2D Solid Thermal Wind Sensors 作者: Chen, Bei; Zhu, Yan-Qing; Yi, Zhenxiang; 等.SENSORS   卷: 15   期: 12   页: 29871-29881   出版年: DEC 2015

Modeling of Temperature Effects on Micromachined Silicon Thermal Wind Sensors 作者: Huang, Qing-An; Chen, Bei; Zhu, Yan-Qing; 等.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   卷: 24   期: 6   页: 2033-2039   出版年: DEC 2015

Design and implementation of novel thin film position-sensitive detectors (TFPSDs) based on photoconductive effect 作者: Zhu, Yan-qing; Shan, Yuan-yuan; Qin, Ming MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   卷: 21   期: 9   特刊: SI   页: 1975-1986   出版年: SEP 2015

Development of a self-packaged 2D MEMS thermal wind sensor for low power applications 作者: Zhu, Yan-qing; Chen, Bei; Qin, Ming; 等.JOURNAL OF MICROMECHANICS AND MICROENGINEERING   卷: 25   期: 8     文献号: 085011   出版年: AUG 2015

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